Saturday, November 29, 2014

SEM data files and image generation script

I've posted some sample data files from my SEM, and also the MATLAB/Octave script that I use to convert them into images:

https://drive.google.com/drive/folders/0B4YXWiqYWB99RGJsTjBtR0YxUzg?resourcekey=0-UFjIt_2ezxbcOHFWFLA8cQ&usp=sharing

Let me know if you have any questions.

This is the support structure underneath a single DLP mirror.  The width of each mirror is about 10 microns.


3 comments:

  1. Awesome picture! What portion MOS actually attached to the mirror? And was the angular position of the mirror controlled by electrostatic force used to bend some of that metal layer?

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    1. The mirror is only attached at the very center to a post that connects to a thin bar. The bar is connected to the rest of the structure at the corners, and when the bar twists, the mirror tilts. This is a torsion spring, and allows for small angular movements, but with a very high spring constant. The mirror is indeed controlled by electrostatic forces. This is accomplished by the electrodes that are in the corners unused by the torsion spring.

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