Saturday, November 29, 2014

SEM data files and image generation script

I've posted some sample data files from my SEM, and also the MATLAB/Octave script that I use to convert them into images:

Let me know if you have any questions.

This is the support structure underneath a single DLP mirror.  The width of each mirror is about 10 microns.


  1. Awesome picture! What portion MOS actually attached to the mirror? And was the angular position of the mirror controlled by electrostatic force used to bend some of that metal layer?

    1. The mirror is only attached at the very center to a post that connects to a thin bar. The bar is connected to the rest of the structure at the corners, and when the bar twists, the mirror tilts. This is a torsion spring, and allows for small angular movements, but with a very high spring constant. The mirror is indeed controlled by electrostatic forces. This is accomplished by the electrodes that are in the corners unused by the torsion spring.