Awesome picture! What portion MOS actually attached to the mirror? And was the angular position of the mirror controlled by electrostatic force used to bend some of that metal layer?
The mirror is only attached at the very center to a post that connects to a thin bar. The bar is connected to the rest of the structure at the corners, and when the bar twists, the mirror tilts. This is a torsion spring, and allows for small angular movements, but with a very high spring constant. The mirror is indeed controlled by electrostatic forces. This is accomplished by the electrodes that are in the corners unused by the torsion spring.
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